1600℃ Single-Layer Graphene Growth CVD Furnace

Applications: Flexible electronics, sensors, composites

Transparent Conductive Films: Touchscreens, OLEDs

Quantum Devices: Hall sensors, spintronics

Energy: Li-metal anodes, supercapacitors

Biomedical: Neural interfaces, drug delivery carriers

Precision CVD System for High-Quality Graphene Production

Cxinduction™ presents a 1600℃ Multi-Atmosphere CVD Furnace engineered for reliable, large-area single-layer graphene growth with >95% monolayer coverage in a single run. Our advanced graphite muffle design enables controlled pyrolysis of carbon precursors (CH₄, C₂H₂, etc.) on metal substrates (Cu, Ru, Ir, Ni), producing graphene with:

✔ Exceptional uniformity

✔ High carrier mobility

✔ Low defect density

Key System Advantages

Precision Gas Control: Multi-zone gas distribution ensures precursor uniformity

Dynamic pressure regulation: (0.1-20 kPa) for optimized growth kinetics

Repeatable Process:

Automated multi-cycle etching/redeposition

Substrate-specific recipes for Cu/Ru/Ir/Ni foils (25-1000μm thickness)

High-Yield Design:

Batch processing for 300×600mm foils (custom sizes available)

Applications: Flexible electronics, sensors, composites

Transparent Conductive Films: Touchscreens, OLEDs

Quantum Devices: Hall sensors, spintronics

Energy: Li-metal anodes, supercapacitors

Biomedical: Neural interfaces, drug delivery carriers

Parameters:

Model

CX-CVD40/GPE

CX-CVD50/GPE

CX-CVD60/GPE

CX-CVD60/GPE

Heating Method

Graphite Resistance

Control Method

Auto & MAN

Max Work Temp

1600℃

Rated power

70KW

85 KW

120 KW

160 KW

Usable Space (mm) W*H*L

400×400×1200

500×500×1500

600×600×1800

600×600×2000

Max. Loading Capacity (L)

192L

375L

648L

720L

Temp Uniformity

±10C (ΔT between 1000C and 2200C)

Max. Heat-up Rate (CEDRT)*

15℃/min

Ultimate Vacuum (CEDRT)*

1.2×10-3mbar

Optional High Vacuum (CEDRT)*

5×10-5mbar

Pressure Rise

1.33×10-2mbar/hr

Working Atmosphere

Fine Vacuum (Optional) / Vacuum / Inert Gas (Ar or N2)

Supply Voltage

Can be customized

Cooling Water Pressure

2bar

Cooling water temp

≤28℃

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